PHYSICS OF RADIO FREQUENCY PLASMAS

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Physics Of Radio Frequency Plasmas

Author : Pascal Chabert
ISBN : 9781139494687
Genre : Science
File Size : 48.95 MB
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Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations.
Category: Science

Radio Frequency Capacitive Discharges

Author : Yuri P. Raizer
ISBN : 9781351419963
Genre : Science
File Size : 72.32 MB
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The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods and results, and theoretical and numerical modeling findings. Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical and experimental works. They provide simple and clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students and postgraduates and as a comprehensive guidebook by specialists.
Category: Science

Plasma Physics An Introductory Course

Author : R. O. Dendy
ISBN : 0521484529
Genre : Science
File Size : 64.36 MB
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This book covers the subject of plasma physics. The first few chapters deal with the fundamentals of plasma physics. Subsequently, the applications and properties of human-made and naturally occurring plasmas are discussed. In addition, there are chapters devoted to general phenomena, such as turbulence and chaos. The computational techniques employed in modeling plasma behavior are also described.
Category: Science

Microwave Rf Applicators And Probes

Author : Mehrdad Mehdizadeh
ISBN : 9780323328425
Genre : Technology & Engineering
File Size : 26.39 MB
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Microwave/RF Applicators and Probes for Material Heating, Sensing, and Plasma Generation, Second Edition, encompasses the area of high-frequency applicators and probes for material interactions as an integrated science. Based on practical experience rather than entirely on theoretical concepts, and emphasizing phenomenological explanations and well-annotated figures, the book represents one of the most important resources on the topics of microwave technologies, applications of RF and microwaves in industry (industrial heating and drying), and microwave engineering. After covering the basics of field-material interactions, the book reviews and categorizes probes and applicators, demonstrates their real-world applications, and offers numerically solved examples. Readers will find valuable design rules and principles of high-frequency applicators and probes for material processing and sensing applications in this expanded edition. Presents new information on how the interactions of electromagnetic fields with materials at high frequencies have given rise to a vast array of practical applications in industry, science, medicine, and consumer markets Thoroughly revised and expanded edition, providing an update on the most recent trends and findings Contains many new sections within existing chapters, along with new chapters on applicators for plasmas at microwave/RF frequencies
Category: Technology & Engineering

Plasma Physics And Engineering Second Edition

Author : Alexander Fridman
ISBN : 9781439884812
Genre : Science
File Size : 41.55 MB
Format : PDF
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Plasma plays an important role in a wide variety of industrial processes, including material processing, environmental control, electronic chip manufacturing, light sources, and green energy, not to mention fuel conversion and hydrogen production, biomedicine, flow control, catalysis, and space propulsion. Following the general outline of the bestselling first edition, Plasma Physics and Engineering, Second Edition provides a clear fundamental introduction to all aspects of the modern field. Reflecting recent scientific and technological developments, this resource will be useful to engineers, scientists, and students working with the physics, engineering, chemistry, and combustion of plasma, as well as chemical physics, lasers, electronics, new methods of material treatment, fuel conversion, and environmental control. The book includes many enhancements and some totally new coverage of fundamental subjects such as: Interaction and dynamics of streamers Plasma-flow interaction High-speed plasma aerodynamics Plasma-surface interaction Mechanisms and kinetics of plasma–medical processes Along with these new topics and deeper coverage of material from the first book, this edition presents two new chapters on microdischarges and discharges in liquids. It also contains an extensive database on plasma kinetics and thermodynamics, many helpful numerical formulas for practical calculations, and an array of problems and concept questions. PowerPointTM slides and a solutions manual are available for qualifying instructors who adopt this book for their courses.
Category: Science

Plasma Physics And Nuclear Fusion Research

Author : Richard D. Gill
ISBN : 9781483217932
Genre : Science
File Size : 79.81 MB
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Plasma Physics and Nuclear Fusion Research covers the theoretical and experimental aspects of plasma physics and nuclear fusion. The book starts by providing an overview and survey of plasma physics; the theory of the electrodynamics of deformable media and magnetohydrodynamics; and the particle orbit theory. The text also describes the plasma waves; the kinetic theory; the transport theory; and the MHD stability theory. Advanced theories such as microinstabilities, plasma turbulence, anomalous transport theory, and nonlinear laser plasma interaction theory are also considered. The book further tackles the pinch and tokamak confinement devices; the stellarator confinement devices; the mirror devices; and the next generation tokamaks. The text also encompasses the fusion reactor studies; heating; and diagnostics. Physicists and people involved in the study of plasma physics and nuclear fusion will find the book invaluable.
Category: Science

Plasma Electronics

Author : Toshiaki Makabe
ISBN : 9781420012279
Genre : Science
File Size : 69.28 MB
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Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition, etching, and even process monitoring and diagnosis. Plasma Electronics: Applications in Microelectronic Device Fabrication explains the fundamental physics and numerical methods necessary to bring these technologies from the laboratory to the factory. Beginning with an overview of the basic characteristics and applications of low-temperature plasma, preeminent experts Makabe and Petrovic explore the physics underlying the complex behavior of non-equilibrium (or low temperature) plasma. They discuss charged particle transport in general and in detail as well as macroscopic plasma characteristics and elementary processes in gas phase and on surfaces. After laying this groundwork, the book examines state-of-the-art computational methods for modeling plasma and reviews various important applications including inductively and capacitively coupled plasma, magnetically enhanced plasma, and various processing techniques, while numerous problems and worked examples reinforce the concepts. Uniquely combining physics, numerical methods, and practical applications, Plasma Electronics: Applications in Microelectronic Device Fabrication equips you with the knowledge necessary to scale up lab bench breakthroughs into industrial innovations.
Category: Science

Kappa Distributions

Author : George Livadiotis
ISBN : 9780128046395
Genre : Science
File Size : 21.53 MB
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Kappa Distributions: Theory and Applications in Plasmas presents the theoretical developments of kappa distributions, their applications in plasmas, and how they affect the underpinnings of our understanding of space and plasma physics, astrophysics, and statistical mechanics/thermodynamics. Separated into three major parts, the book covers theoretical methods, analytical methods in plasmas, and applications in space plasmas. The first part of the book focuses on basic aspects of the statistical theory of kappa distributions, beginning with their connection to the solid backgrounds of non-extensive statistical mechanics. The book then moves on to plasma physics, and is devoted to analytical methods related to kappa distributions on various basic plasma topics, spanning linear/nonlinear plasma waves, solitons, shockwaves, and dusty plasmas. The final part of the book deals with applications in space plasmas, focusing on applications of theoretical and analytical developments in space plasmas from the heliosphere and beyond, in other astrophysical plasmas. Kappa Distributions is ideal for space, plasma, and statistical physicists; geophysicists, especially of the upper atmosphere; Earth and planetary scientists; and astrophysicists. Answers important questions, such as how plasma waves are affected by kappa distributions and how solar wind, magnetospheres, and other geophysical, space, and astrophysical plasmas can be modeled using kappa distributions Presents the features of kappa distributions in the context of plasmas, including how kappa indices, temperatures, and densities vary among the species populations in different plasmas Provides readers with the information they need to decide which specific formula of kappa distribution should be used for a certain occasion and system (toolbox)
Category: Science

Physics Of Radiofrequency Capacitive Discharge

Author : V. P. Savinov
ISBN : 9780429894220
Genre : Science
File Size : 26.25 MB
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This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.
Category: Science

Principles Of Plasma Discharges And Materials Processing

Author : Michael A. Lieberman
ISBN : 9780471724247
Genre : Science
File Size : 87.92 MB
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A Thorough Update of the Industry Classic on Principles of Plasma Processing The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals. The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters. New and expanded topics include: * Updated cross sections * Diffusion and diffusion solutions * Generalized Bohm criteria * Expanded treatment of dc sheaths * Langmuir probes in time-varying fields * Electronegative discharges * Pulsed power discharges * Dual frequency discharges * High-density rf sheaths and ion energy distributions * Hysteresis and instabilities * Helicon discharges * Hollow cathode discharges * Ionized physical vapor deposition * Differential substrate charging With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever.
Category: Science