HANDBOOK OF THIN FILM TECHNOLOGY

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Handbook Of Thin Film Technology

Author : Hartmut Frey
ISBN : 9783642054303
Genre : Technology & Engineering
File Size : 50.35 MB
Format : PDF, ePub, Mobi
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“Handbook of Thin Film Technology” covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.
Category: Technology & Engineering

Handbook Of Thin Film Deposition

Author : Krishna Seshan
ISBN : 9780128123126
Genre : Technology & Engineering
File Size : 40.71 MB
Format : PDF
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Handbook of Thin Film Deposition, Fourth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials for memory applications and methods for thin film optical processes. The book is broken up into three sections: scaling, equipment and processing, and applications. In this newly revised edition, the handbook will also explore the limits of thin film applications, most notably as they relate to applications in manufacturing, materials, design and reliability. Offers a practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance, applications and the limitations faced by those processes Covers core processes and applications in the semiconductor industry and new developments within the photovoltaic and optical thin film industries Features a new chapter discussing Gates Dielectrics
Category: Technology & Engineering

Handbook Of Thin Film Deposition Processes And Techniques

Author : Krishna Seshan
ISBN : 9780815517788
Genre : Technology & Engineering
File Size : 21.29 MB
Format : PDF
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New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. The book includes much cutting-edge material. Entirely new chapters on contamination and contamination control describe the basics and the issues—as feature sizes shrink to sub-micron dimensions, cleanliness and particle elimination has to keep pace. A new chapter on metrology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together all the physical vapor deposition techniques. Two entirely new areas receive full treatment: chemical mechanical polishing which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.
Category: Technology & Engineering

Handbook Of Thin Film Deposition Processes And Techniques

Author : Klaus K. Schuegraf
ISBN : UOM:39015012052265
Genre : Technology & Engineering
File Size : 28.32 MB
Format : PDF
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The most recent developments and techniques in thin film deposition for high technology applications are described by 23 authorities in the field.
Category: Technology & Engineering

Handbook Of Thin Film Process Technology

Author : David A Glocker
ISBN : 9781351089685
Genre : Technology & Engineering
File Size : 20.81 MB
Format : PDF, Kindle
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The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume is a special issue on reactive sputtering which will be of interest to a wide range of industrial and academic researchers in addition to owners of the main Handbook. Some recent developments in the reactive sputtering field are covered, including unbalanced magnetron sputtering and pulsed reactive sputtering. The articles contain a wealth of practical information relating to applications, practice and manufacturing techniques.
Category: Technology & Engineering

Handbook Of Thin Film Deposition Techniques Principles Methods Equipment And Applications Second Editon

Author : Krishna Seshan
ISBN : 0815514425
Genre : Technology & Engineering
File Size : 24.90 MB
Format : PDF, ePub, Docs
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The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. This second edition explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of submicron dimensions. The book covers PVD, laser and E-beam assisted deposition, MBE, and ion beam methods to bring together all of the physical vapor deposition techniques. The book also includes coverage of chemical mechanical polishing that helps attain the flatness that is required by modern lithography methods and new materials used for interconnect dielectric materials, specifically organic polyimide materials.
Category: Technology & Engineering

Handbook Of Thin Film Process Technology

Author : S. Ismat Shah
ISBN : 1351098136
Genre : Surfaces (Technology)
File Size : 60.34 MB
Format : PDF, Docs
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"The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume is a special issue on reactive sputtering which will be of interest to a wide range of industrial and academic researchers in addition to owners of the main Handbook. Some recent developments in the reactive sputtering field are covered, including unbalanced magnetron sputtering and pulsed reactive sputtering. The articles contain a wealth of practical information relating to applications, practice and manufacturing techniques."--Provided by publisher.
Category: Surfaces (Technology)

Thin Film Technology Handbook

Author : Aicha Elshabini
ISBN : 0070190259
Genre : Technology & Engineering
File Size : 63.94 MB
Format : PDF, ePub
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The most comprehensive source available on the preparation, characterization, and emerging applications of thin film. This book features extensive new advances applied in multichip modules (MCMs), and covers the basic principles and applications of thin film deposition techniques for practical use. It provides and develops design guidelines to realize multilayer structures in microcircuits, thus addressing a critical and rapidly growing area.
Category: Technology & Engineering

Handbook Of Deposition Technologies For Films And Coatings

Author : Peter M. Martin
ISBN : 9780815520320
Genre : Technology & Engineering
File Size : 87.49 MB
Format : PDF
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This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications. * Explains in depth the many recent i
Category: Technology & Engineering